ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,004, issued on Nov. 4, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle microscope and stage" was invented by Kazuki Ishizawa (Tokyo), Kenichi Nishinaka (Tokyo) and Michiko Suzuki (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle microscope includes an electron gun provided inside a barrel and a stage 20. In the stage 20, a sample holder 30 holding a sample SAM can be installed. The stage 20 includes an annular rough movement stage member 21a and an annular fine movement stage member 21b. An X rough movement actuator 22a and a Y rough movement actuator 23a are connected to the rough movement stage member 21a. ...