US Patent Issued to Hitachi High-Tech on Nov. 4 for "Charged particle beam scanning module, charged particle beam device, and computer" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,008, issued on Nov. 4, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam scanning module, charged particle beam device, and computer" was invented by Wen Li (Tokyo), Shinichi Murakami (Tokyo), Hiroyuki Takahashi (Tokyo), Makoto Suzuki (Tokyo) and Wataru Mori (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam scanning module, a charged particle beam device, and a computer that can correct an INL error in a DAC circuit in real time. The charged particle beam scanning module includes a scanning controller configured to output a scanning digital signal of a charged particle beam, a DAC circuit configured t...