US Patent Issued to Hitachi High-Tech on Nov. 18 for "Charged particle beam device and scan waveform generation method" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,070, issued on Nov. 18, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam device and scan waveform generation method" was invented by Keisuke Tanuma (Tokyo), Masato Kamio (Tokyo), Hironori Itabashi (Tokyo), Hiroki Kannami (Tokyo), Yusuke Seki (Tokyo), Takumi Uezono (Tokyo) and Mitsuhiro Nakamura (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "It is aimed to properly correct the various types of distortion without a reduction in observation throughput. The present disclosure provides a charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam and includes: a deflection coil t...