ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,665, issued on Nov. 11, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by Keigo Kasuya (Tokyo), Shuhei Ishikawa (Tokyo), Kenji Tanimoto (Tokyo), Shunichi Watanabe (Tokyo), Takashi Doi (Tokyo) and Yusuke Sakai (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam device that can precisely manage a temperature at which a cold field emitter is heated. A charged particle beam device includes: a cold field emitter including a tip having a sharpened distal end, a filament connected to the tip, and an auxiliary electrode covering the filament and having an opening from which ...