ALEXANDRIA, Va., June 10 -- United States Patent no. 12,292,389, issued on May 6, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).
"Defect inspection apparatus" was invented by Toshifumi Honda (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A defect inspection apparatus including a stand that supports a sample, an illumination optical system that irradiates the sample with illumination light, a scanning device that drives the sample stand to change position, detection optical systems that condense illumination scattered light from a surface of the sample, sensors that convert the condensed light into an electric signal and output a detection signal, a storage device that stores a plurality of feature v...