ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,299, issued on June 17, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by U Oh (Tokyo), Minoru Yamazaki (Tokyo) and Yuko Sasaki (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a charged particle beam device with which optimal parameters for the device can be effectively derived in a short time period. This charged particle beam device comprises: an electron gun (1) that irradiates a sample (10) with an electron beam (2); an image processing unit (901) that acquires an image of the sample (10) from a signal (12) generated by the sample (10) due to the electron beam (2)...