ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,211,668, issued on Jan. 28, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by Kohei Suzuki (Tokyo), Shunsuke Mizutani (Tokyo) and Yuji Kasai (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam device capable of detecting signal charged particles in a wide range of elevation angles from a large elevation angle to a small elevation angle and distinguishing detection signals between backscattered charged particles and secondary charged particles regardless of distribution of the signal charged particles. The charged particle beam device according to the disclosure includes ...