ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,429, issued on Jan. 13, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).
"Charged particle beam system" was invented by Hirokazu Tamaki (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam system includes: a charged particle beam device configured to emit a charged particle beam from a charged particle source to a sample via a charged particle optical system; and a control system configured to control the charged particle beam device. The control system scans the sample with the charged particle beam in a manner of forming a scan trajectory and determines scores of signal intensities associated with different scan directions...