ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,237,145, issued on Feb. 25, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).
"Charged particle beam device and inspection device" was invented by Atsuko Shintani (Tokyo), Makoto Suzuki (Tokyo) and Hiroki Kawada (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "System and method for preventing blurring of an image in a scanning direction caused by a signal processing delay of a detector. of a charged particle beam device. The charged particle beam device is configured to calibrate first image data generated based on a detection signal output from a detector when the sample is two-dimensionally scanned with the charged particle beam, to generate secon...