US Patent Issued to HITACHI HIGH-TECH on Dec. 23 for "Charged particle beam apparatus and method for calculating roughness index" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,505,976, issued on Dec. 23, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).

"Charged particle beam apparatus and method for calculating roughness index" was invented by Daisuke Bizen (Tokyo), Kei Sakai (Tokyo), Junichi Kakuta (Tokyo), Masumi Shirai (Tokyo) and Minoru Yamazaki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Roughness measurement corrects a machine difference utilizing first PSD data indicating power spectral density of a line pattern measured for a line pattern formed on a wafer for machine difference management by a reference machine in roughness index calculation and second PSD data indicating power spectral density of a line pa...