ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,337, issued on Dec. 16, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Measurement system and measurement method" was invented by Akiyuki Sugiyama (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a technology that can reduce the work burden of setting measurement conditions for each circuit pattern when the same measurement procedure is performed on a plurality of circuit patterns formed on a semiconductor material. A measurement system according to the present disclosure sets a measurement point set in a reference circuit pattern for another circuit pattern having the same circuit pattern, applies inversion or rotation to the me...