ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,618, issued on April 15, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Defect inspection device" was invented by Kazuhide Sato (Tokyo), Yukihisa Mohara (Tokyo) and Masami Makuuchi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "The purpose of the present disclosure is to provide a defect inspection device with which it is possible to suppress variation in an output signal occurring when an imaging operation condition for an image sensor is changed. The defect inspection device according to the present disclosure comprises a detector that outputs a detection signal for signal light generated by irradiating a sample with light. The detector i...