US Patent Issued to HERCH OPTO ELECTRONIC TECHNOLOGY on Jan. 13 for "Multichannel optical fiber fluorescence temperature measurement device and method for electrostatic chuck in etcher" (Chinese Inventor)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,547, issued on Jan. 13, was assigned to HERCH OPTO ELECTRONIC TECHNOLOGY Co. LTD. (Xi'an, China).

"Multichannel optical fiber fluorescence temperature measurement device and method for electrostatic chuck in etcher" was invented by Wensong Zhang (Shaanxi, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a multichannel optical fiber fluorescence temperature measurement device for an electrostatic chuck in an etcher and a method. The device includes temperature sensors. Each temperature sensor includes a fluorescence temperature probe, a ceramic sleeve, a transition optical fiber, a transmission optical fiber, an optical coupling modu...