US Patent Issued to Harbin Institute of Technology on Aug. 12 for "Learning control system and method for ultra-precision lithographic apparatus based on uncertainty compensation" (Chinese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,386,267, issued on Aug. 12, was assigned to Harbin Institute of Technology (Harbin, China).

"Learning control system and method for ultra-precision lithographic apparatus based on uncertainty compensation" was invented by Fazhi Song (Harbin, China), Pengyu Sun (Harbin, China), Aichen Wu (Harbin, China), Yang Liu (Harbin, China) and Jiubin Tan (Harbin, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "A learning control system includes a movement trajectory generation unit, a learning control unit, a feedback control unit, and an uncertainty compensation unit. The movement trajectory generation unit includes a movement trajectory generator; the moveme...