ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,447,559, issued on Oct. 21, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan).
"Laser processing device and laser processing method" was invented by Iku Sano (Hamamatsu, Japan), Takeshi Sakamoto (Hamamatsu, Japan) and Katsuhiro Korematsu (Hamamatsu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A laser processing device includes a control unit, and the control unit executes a first process of controlling a laser irradiation unit according to a first processing condition set such that a modified region and a modified region are formed inside a wafer; a second process of identifying a state related to each of the modified regions, and of ...