US Patent Issued to HAMAMATSU PHOTONICS on June 3 for "Inspection device for a semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,320,842, issued on June 3, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan).

"Inspection device for a semiconductor device" was invented by Tomonori Nakamura (Hamamatsu, Japan), Akihito Uchikado (Hamamatsu, Japan) and Mitsunori Nishizawa (Hamamatsu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection apparatus includes a light source that emits light, an optical amplifier that amplifies input light and outputs the amplified light, an optical system (an objective lens, an imaging optical system, and a scanning optical system) that irradiates a semiconductor device with the light from the light source and guides light from the sem...