US Patent Issued to HAMAMATSU PHOTONICS on July 1 for "Electrostatic chuck device power supply, electrostatic chuck device, and dechuck control method" (Japanese Inventor)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,715, issued on July 1, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan).

"Electrostatic chuck device power supply, electrostatic chuck device, and dechuck control method" was invented by Takahiro Tsuchiya (Hamamatsu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an electrostatic chuck device including: a voltage application unit configured to apply a dechuck voltage that is used when dechucking an object to a first electrode and a second electrode, the dechuck voltage being constituted by a first AC voltage applied to the first electrode in a first waveform, and a second AC voltage applied to the second electrode in a se...