ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,347, issued on Dec. 30, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan).
"Mirror device manufacturing method and mirror unit manufacturing method" was invented by Daiki Suzuki (Hamamatsu, Japan), Tomoyuki Ide (Hamamatsu, Japan) and Mikito Takahashi (Hamamatsu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and...