US Patent Issued to GSF SOLUTION on Sept. 9 for "Method and apparatus for controlling wafer transfer robot using static electricity prediction" (South Korean Inventor)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,765, issued on Sept. 9, was assigned to GSF SOLUTION Co. LTD. (Chungcheongbuk-Do, South Korea).

"Method and apparatus for controlling wafer transfer robot using static electricity prediction" was invented by Dong Hyun Kim (Chungcheongbuk-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a method of controlling a wafer transfer robot using static electricity prediction, and the method includes acquiring, when a wafer is transported by an end effector of the wafer transfer robot, temperature and humidity data around the wafer from a temperature sensor and a humidity sensor of a static elimination system i...