ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,278, issued on May 20, was assigned to GREEN TECHNOLOGY INVESTMENTS LLC (Scottsdale, Ariz.).
"Universal ring wafer support apparatus" was invented by Tal Levin (Scottsdale, Ariz.) and Sorin Tohatan (Scottsdale, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A universal ring wafer support apparatus that includes at least one raised support to securely support different size wafers above and separated from the main body to enable dust, particles and contaminants to flow away from a wafer and through the main body to a back side thereof. The universal ring wafer support apparatus and the at least one raised support is formed of a highly conductiv...