ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,687, issued on April 29, was assigned to Google LLC (Mountain View, Calif.).
"Fabricating a device using a multilayer stack" was invented by Anthony Edward Megrant (Goleta, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of fabricating a device is presented. The method includes forming a multilayer stack on a substrate which has a principal surface. The multilayer stack includes a supporting layer formed over the principal surface of the substrate and a photoresist layer formed on the supporting layer, patterning the multilayer stack to form at least one opening such that the photoresist layer is undercut by the supporting layer and an...