US Patent Issued to GlobalFoundries U.S. on Jan. 13 for "Microfluidic channels in a substrate with a surface covered by a layer stack" (Belgian, American Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,521,714, issued on Jan. 13, was assigned to GlobalFoundries U.S. Inc. (Malta, N.Y.).

"Microfluidic channels in a substrate with a surface covered by a layer stack" was invented by Ramsey Hazbun (Colchester, Vt.), Siva P. Adusumilli (South Burlington, Vt.), Mark Levy (Williston, Vt.) and Bartlomiej Jan Pawlak (Leuven, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "Structures for a microfluidic channel and methods of forming a structure for a microfluidic channel. The structure comprises a semiconductor substrate including a trench and a layer stack on the semiconductor substrate. The layer stack includes a first layer, a second layer between the ...