US Patent Issued to Gigaphoton on Oct. 7 for "Target supply device and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,439,503, issued on Oct. 7, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Target supply device and electronic device manufacturing method" was invented by Masaki Nakano (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A target supply device is configured to supply a liquid state target substance including tin to a concentration position of laser light to generate EUV light. The target supply device includes a tank configured to contain the target substance; and a nozzle communicating with an inside of the tank, and having a nozzle hole through which the target substance passes. Here, an uneven structure is formed on a surface of the noz...