US Patent Issued to Gigaphoton on Oct. 7 for "Line narrowing gas laser device, wavelength control method, and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,333, issued on Oct. 7, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Line narrowing gas laser device, wavelength control method, and electronic device manufacturing method" was invented by Takahito Kumazaki (Oyama, Japan) and Osamu Wakabayashi (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A line narrowing gas laser device includes an actuator changing a center wavelength of pulse laser light, and a processor controlling the actuator. The processor reads parameters including a number of irradiation pulses of pulse laser light to be radiated to one location of an irradiation receiving object, a shortest wavelength, and a longest wav...