US Patent Issued to Gigaphoton on June 24 for "Gas laser apparatus, laser beam emitting method of gas laser apparatus, and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,313, issued on June 24, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Gas laser apparatus, laser beam emitting method of gas laser apparatus, and electronic device manufacturing method" was invented by Daisuke Tei (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas laser apparatus includes a chamber; a window provided in the chamber; an optical path tube connected to the chamber; a gas supply port that supplies a purge gas into the optical path tube; an exhaust port that exhausts a gas in the optical path tube; and a control unit, the exhaust port including a main exhaust port provided in the optical path tube, and an auxiliary e...