ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,705, issued on June 17, was assigned to Gigaphoton Inc. (Tochigi, Japan).
"Laser apparatus and electronic device manufacturing method" was invented by Yuki Tamaru (Oyama, Japan) and Taisuke Miura (Oyama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A laser apparatus according to an aspect of the present disclosure includes a master oscillator configured to emit a laser beam, an amplifier including an optical resonator and configured to amplify the laser beam emitted by the master oscillator in the optical resonator, and a phase shift structure disposed on an optical path between the master oscillator and the amplifier at a position closer to...