US Patent Issued to Gigaphoton on June 10 for "Chamber device, and electronic device manufacturing method" (Japanese, American Inventors)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,327,975, issued on June 10, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Chamber device, and electronic device manufacturing method" was invented by Junichi Fujimoto (Oyama, Japan), Takahiro Tatsumi (Oyama, Japan), Kazuki Nagai (Oyama, Japan) and Jeffrey P. Sercel (Manchester, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the...