US Patent Issued to Gigaphoton on July 8 for "Gas laser apparatus and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,355,204, issued on July 8, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Gas laser apparatus and electronic device manufacturing method" was invented by Keisuke Ishida (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas laser apparatus includes a laser oscillator including a pair of discharge electrodes disposed to face each other and configured to generate light from laser gas upon application of voltage, and a laser-side resonator in which the light resonates; an amplifier including an amplification unit and an amplification-side resonator; a beam splitter configured to reflect a part of the light from the laser-side resonator; an o...