US Patent Issued to Gigaphoton on Feb. 3 for "Gas laser device and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,412, issued on Feb. 3, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Gas laser device and electronic device manufacturing method" was invented by Yousuke Fujimaki (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas laser device includes a laser oscillator outputting laser light, and a laser amplifier amplifying the laser light and outputting the amplified laser light. The laser amplifier includes a discharge chamber accommodating electrodes for causing discharge, an input coupling optical system causing part of the laser light to be transmitted toward the discharge chamber, and an output coupling optical system configuring an opti...