US Patent Issued to Gigaphoton on Feb. 10 for "Extreme ultraviolet light generation apparatus and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,245, issued on Feb. 10, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Extreme ultraviolet light generation apparatus and electronic device manufacturing method" was invented by Yoshifumi Ueno (Oyama, Japan), Shogo Kitasaka (Oyama, Japan) and Yuichi Nishimura (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light generation apparatus includes a target supply unit, a target passage detection device, a delay circuit, a laser device, a target image capturing device, and a processor. Here, the processor controls the vibrating element to provide irregular intervals between droplet targets adjacent to each other; gen...