US Patent Issued to Gigaphoton on Dec. 9 for "Control method of discharge-excitation type laser device, discharge-excitation type laser device, and electronic device manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,616, issued on Dec. 9, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Control method of discharge-excitation type laser device, discharge-excitation type laser device, and electronic device manufacturing method" was invented by Keisuke Ishida (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A control method of a discharge-excitation type laser device including a power source configured to control a pulse energy of pulse laser light includes: during a first period, outputting the pulse laser light including a plurality of pulses from the discharge-excitation type laser device while periodically changing a wavelength; calculating correc...