US Patent Issued to Gigaphoton on Aug. 12 for "Light source parameter information management method, light source parameter information management apparatus, and computer readable medium" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,389,508, issued on Aug. 12, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Light source parameter information management method, light source parameter information management apparatus, and computer readable medium" was invented by Yuji Minegishi (Oyama, Japan) and Osamu Wakabayashi (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A light source parameter information management method for managing information on a parameter of a light source used in an exposure apparatus, the method including acquiring priority target parameter information containing an item of a variable that is a priority target parameter prioritized in the operation o...