US Patent Issued to Gigaphoton on April 22 for "Extreme ultraviolet light generation method, extreme ultraviolet light generation apparatus, and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,284,745, issued on April 22, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Extreme ultraviolet light generation method, extreme ultraviolet light generation apparatus, and electronic device manufacturing method" was invented by Yoshiyuki Honda (Oyama, Japan), Hirokazu Hosoda (Oyama, Japan) and Kouichiro Kouge (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light generation method includes a target supply step of outputting a droplet target into a chamber, a prepulse laser light irradiation step of irradiating the droplet target with prepulse laser light to generate a diffusion target, and a main pulse laser light ...