US Patent Issued to Gallium Enterprises on Sept. 23 for "RPCVD apparatus and methods for forming a film" (Australian Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,608, issued on Sept. 23, was assigned to Gallium Enterprises Pty Ltd (Silverwater, Australia).

"RPCVD apparatus and methods for forming a film" was invented by Joshua David Brown (Silverwater, Australia), Satyanarayan Barik (Silverwater, Australia), Stephen Richard O'Farrell (Silverwater, Australia) and Ian Mann (Silverwater, Australia).

According to the abstract* released by the U.S. Patent & Trademark Office: "RPCVD apparatus for forming a film is disclosed including a showerhead having at least one gas chamber, one or more plasma inlets to deliver plasma from one or more plasma generators into a reaction chamber; and a plurality of gas inlets to deliver gas from at least one ...