ALEXANDRIA, Va., June 17 -- United States Patent no. 12,312,299, issued on May 27, was assigned to Fujifilm Electronic Materials U.S.A. Inc. (N. Kingstown, R.I.).
"Systems and methods for purifying solvents" was invented by Eduardo Ramirez Romero (Grapevine, Texas) and David Bollinger (Grapevine, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process."
The patent was filed on March 26, 2021, under Application No. 17/213,325.
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