ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,473,904, issued on Nov. 18, was assigned to Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. (Munich).
"Electrostatic micro-pump and a process to produce an electrostatic micro-pump" was invented by Henry Leistner (Munich), Martin Wackerle (Munich), Martin Richter (Munich) and Robert Wieland (Munich).
According to the abstract* released by the U.S. Patent & Trademark Office: "An embodiment is an electrostatic micro-pump including a diaphragm arrangement including a diaphragm and a first electrode structure. The electrostatic micro-pump further includes a valve arrangement, including an inlet check valve and an outlet check valve, wherein the diaphragm arrangement ...