US Patent Issued to Fraunhofer-Gesellschaft zur forderung der angewandten Forschung on March 25 for "Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources" (German Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,258,661, issued on March 25, was assigned to Fraunhofer-Gesellschaft zur forderung der angewandten Forschung e.V. (Munich).

"Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources" was invented by Michael Vergohl (Braunschweig, Germany), Andreas Pflug (Braunschweig, Germany), Tobias Zickenrott (Braunschweig, Germany) and Stefan Bruns (Braunschweig, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a device and a method for producing layers whose layer thickness distribution can be adjusted in coating systems with horizontally rot...