ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,359, issued on Jan. 27, was assigned to FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (Munich).
"MEMS for highly efficient interaction with a volume flow" was invented by Anton Melnikov (Dresden, Germany), Franziska Wall (Dresden, Germany), Jorge Mario Monsalve Guaracao (Dresden, Germany), Bert Kaiser (Dresden, Germany) and Sergiu Langa (Dresden, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "An MEMS having a layered structure includes a cavity disposed in the layered structure and fluidically coupled to an external environment of the layered structure through at least one opening in the layered structure. The MEMS inc...