ALEXANDRIA, Va., June 4 -- United States Patent no. 12,323,753, issued on June 3, was assigned to FORTEMEDIA INC. (Alviso, Calif.).
"Micro-electro-mechanical system structure" was invented by Chih-Yuan Chen (Tainan, Taiwan), Feng-Chia Hsu (Tainan, Taiwan), Chun-Kai Mao (Tainan, Taiwan), Jien-Ming Chen (Tainan, Taiwan), Wen-Shan Lin (Tainan, Taiwan) and Nai-Hao Kuo (Tainan, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS structure is provided. The MEMS structure includes a substrate having an opening portion and a backplate disposed on one side of the substrate and having acoustic holes. The MEMS structure also includes a diaphragm disposed between the substrate and the backplate and extending ac...