US Patent Issued to Finesse Technology on April 22 for "Hollow cathode discharge assistant transformer coupled plasma source and operation method of the same" (Taiwanese Inventor)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,284,747, issued on April 22, was assigned to Finesse Technology Co. Ltd. (Hsinchu, Taiwan).

"Hollow cathode discharge assistant transformer coupled plasma source and operation method of the same" was invented by Chwung-Shan Kou (Hsinchu County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are a hollow cathode discharge assistant transformer coupled plasma source and an operation method of the same. A reaction chamber with an annular channel is provided, and a ferrite transformer with a first ferrite magnetic core wound with a first coil and a second ferrite magnetic core wound with a second coil and a drive power source is provided. Th...