ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,099, issued on Sept. 9, was assigned to FEI Co. (Hillsboro, Ore.).
"Systems and methods for detecting beam displacement" was invented by James B McGinn (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Detectors, systems, and methods for detecting lateral beam displacement for a beam microscopy system are described herein. In one aspect, a detector can include an aperture for allowing a charged particle beam passing through the detector and irradiating a sample; and a plurality of rails arranged in a first plane extending radially outward from the aperture, wherein each of the plurality of rails is configured to detect charged particle...