US Patent Issued to FEI on Sept. 23 for "Systems and methods for hybrid enhancement of scanning electron microscope images" (Oregon Inventor)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,423,772, issued on Sept. 23, was assigned to FEI Co. (Hillsboro, Ore.).

"Systems and methods for hybrid enhancement of scanning electron microscope images" was invented by Umesh Adiga (Hillsboro, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for performing a hybrid machine learning method for enhancing scanning electron microscopy (SEM) images are disclosed herein. Methods include the steps of acquiring a plurality of images of a region of a sample that were each generated by irradiating the sample with a pulsed charged particle beam, upscaling each of the individual images to generate a plurality of upscaled images of the reg...