ALEXANDRIA, Va., March 26 -- United States Patent no. 12,260,583, issued on March 25, was assigned to FEI Co. (Hillsboro, Ore.).
"3D fiducial for precision 3D NAND channel tilt/shift analysis" was invented by Mark Najarian (Hillsboro, Ore.), Victoriea Bird (Hillsboro, Ore.), Peter D. Carleson (Hillsboro, Ore.) and Sean Morgan-Jones (Hillsboro, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems for and methods for generating precise structure reconstruction using slice and view images, are disclosed. An example method comprises, obtaining a slice and view images of a sample that depicts a 3D fiducial and cross-sections of a structure in the sample. The 3D fiducial is configured such that when a layer...