ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,587, issued on Aug. 19, was assigned to FEI Co. (Hillsboro, Ore.).
"Simple spherical aberration corrector for SEM" was invented by Ali Mohammadi-Gheidari (Best, Netherlands), Alexander Henstra (Utrecht, Netherlands) and Luigi Mele (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Compact correctors for correcting spherical aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure a strong hexapole configured to generate a strong hexapole field when a voltage is applied to it, and a weak hexapole positioned between the strong hexapole and a sample. The strong hexapole is p...