US Patent Issued to Exo Imaging on April 29 for "High density multi-poled thin film piezoelectric devices and methods of making the same" (California, Massachusetts Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,289,999, issued on April 29, was assigned to Exo Imaging Inc. (Santa Clara, Calif.).

"High density multi-poled thin film piezoelectric devices and methods of making the same" was invented by Brian Bircumshaw (Oakland, Calif.) and Sandeep Akkaraju (Wellesley, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are multi-poled piezoelectric devices with improved packing density and methods for making such multi-poled piezoelectric devices with improved packing density. The multi-poled piezoelectric devices comprise: a) a top electrode, a piezoelectric layer, and a bottom electrode fabricated on a substrate; b) vias generated by etching the piezo...