ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,389,797, issued on Aug. 12, was assigned to EVATEC AG (Trubbach, Switzerland).
"Deposition process for piezoelectric coatings" was invented by Boris Trajcevski (Sax, Switzerland).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method to deposit a coating including a material with highly oriented microstructure, the method including at least the following sequence of process steps: providing a flat substrate into a first vacuum processing chamber; etching one surface of the substrate by physical vapor etching; depositing a first metallic layer on the etched substrate surface by sputtering in a first metal deposition step; annealing the first metallic lay...