ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,850, issued on Nov. 11, was assigned to EV GROUP E. THALLNER GMBH (St. Florian am Inn, Austria).
"Device and method for measuring a substrate" was invented by Jacek Gasiorowski (Scharding, Austria) and Markus Wimplinger (Ried im Innkreis, Austria).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for measuring a multilayered substrate, particularly with at least one structure with critical dimensions, the method including the steps of (a) producing the substrate with a plurality of layers, particularly with a structure, wherein the dimensions of the layers and in particular the structures are known, (b) measuring the substrate using at least on...