US Patent Issued to Eugenus on May 20 for "Conformal and smooth titanium nitride layers and methods of forming the same" (California Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,226, issued on May 20, was assigned to Eugenus Inc. (San Jose, Calif.).

"Conformal and smooth titanium nitride layers and methods of forming the same" was invented by Sung-Hoon Jung (Santa Clara, Calif.), Niloy Mukherjee (San Ramon, Calif.), Yoshikazu Okuyama (Santa Cruz, Calif.), Nariman Naghibolashrafi (San Jose, Calif.), Bunsen B. Nie (Fremont, Calif.), Hae Young Kim (San Jose, Calif.) and Somilkumar J. Rathi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the...