ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,963, issued on Dec. 2, was assigned to EUGENE TECHNOLOGY Co. LTD. (Yongin-si, South Korea).
"Substrate processing apparatus" was invented by Yong Ki Kim (Hwaseong-si, South Korea), Yang Sik Shin (Yongin-si, South Korea), Dong Been Huh (Bucheon-si, South Korea) and Tae Ho Lee (Yeoju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "In accordance with an exemplary embodiment of the present invention, an apparatus for processing substrate comprising: a support plate; an antenna disposed in parallel to one surface of the support plate and having 1st to n-th turns (n=an integer greater than 3) wound along one direction from an inner end; and ...