US Patent Issued to ERS Electronic on April 15 for "Calibration arrangement and corresponding calibration method, and calibration apparatus" (German Inventor)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,692, issued on April 15, was assigned to ERS Electronic GmbH (Germering, Germany).

"Calibration arrangement and corresponding calibration method, and calibration apparatus" was invented by Klemens Reitinger (Germering, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A calibration apparatus is provided with a calibration card (6) attachable in an insertion opening (E) of a wafer prober (1) to form a corresponding substantially closed space. A calibration temperature probe (60, 61) attached to the calibration card can be approached by a temperature-controlled chuck (3), for clamping the wafer (4) which can be moved by means of a position control...